Silicon Microchannel Heat Sinks: Theories and Phenomena by Dr. Lian Zhang, Professor Kenneth E. Goodson, Professor

By Dr. Lian Zhang, Professor Kenneth E. Goodson, Professor Thomas W. Kenny (auth.)

Two-phase microchannel cooling is without doubt one of the such a lot promising thermal-management applied sciences for destiny high-power IC chips. realizing the boiling approach and the two-phase movement habit in microchannels is the main to profitable implementation of a microchannel warmth sink. This e-book makes a speciality of the phase-change phenomena and the warmth move in sub-150 mm diameter silicon microchannels, with emphasis on thermal size and modeling, and the effect of small dimensions on two-phase stream regimes. Scientists and engineers tackling thermal and MEMS difficulties will locate the dialogue during this ebook inspiring for his or her destiny layout of microscale warmth move experiments. This publication also will give a contribution to the research of two-phase microchannel flows by means of offering vast experimental info that are another way slightly available.

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After the substrate is bonded to glass, the 2 mrn wide wings can be easily diced from the device chip. The idea can be used in many other fragile MEMS structure fabrication processes. 3], the more complicated physics of boiling flow in microchannels is relatively poorly understood. Unlike in the single-phase forced convective flow, the two-phase convective coefficient is no longer a constant for fully developed conditions, but closely coupled with local flow conditions. Depending on how the vapor and liquid mixture moves in the channel, two basic flow models have been used for pressure drop simulations.

8 ... n;... 6 Q) ::::I - ,.. : I /) I/) .!! 5 Dimensionless flow rate Fig. 12 Dimensionless plot of the chip average temperature change as a function of the flow rate in Fig. 11. In the dimensionless plot in Fig. 2. 5) where Tavg and Q are the measured chip average temperature and flow rate respectively. Tsa, is the saturation temperature of water. Since the exit of the channels are open to the air, Tsat=IOO DC at the atmospheric pressure. To is the inlet water temperature, assumed to be the room temperature of 22 DC; q is the heat rate, equal to 25 W; and cp is the specific heat of water, equal to 4185 J/kg-K.

15 Q. , • .. • • 27 • • • • .. 0 0 100 50 150 200 Chip average temperature (C) Fig. 13 Inlet pressure change from single-phase to two-phase flow. 4 was tested at constant flow rate of 1 mllmin with varying heat rate. The pressure drop along the rnicrochannels can vary dramatically because of the property difference between water and vapor. 200 --... 0 180 Q) 160 -... 2 Q. :c0 I I I I I 140 Q. E I : Two-pha e • • It I I: I I If 80 60 .. I I I 40 20 0 10 20 30 40 Heat rate (W) • R2 (outlet) • R1 (inlet) o R3 (middle, less boiling) D R4 (middle, more boiling) Fig.

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